Bệ Tinh Chỉnh Chính Xác Trục X/XY Kohzu

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Thông số kỹ thuật

Model Number 1. Kohzu's significant alpha-numeric model numbers offer quick product insight.
Mirror Model Number 2. Mirror symmetry of standard stage...
Table Size 3. Table size refers to the stage's valid mounting table size.
Guide MechanismCross-Roller Guide4. Type of guide mechanism used on this stage.
Motion Range Coarce 13mm, Fine 0.3mm5. Stage travel range in the positive and negative directions from it's centered or neutral position. Fine Pitch Positioner types will indicate total coarse and fine travel ranges respectively.
Straightness≦2μm/13mm6. Straightness is measured relative to mounting surface.
Minimum ReadoutCoarse 10μm/Scale, Fine 0.5μm/Scale7. Minimum readout is the smallest measurable value of motion.
Moment Load Stiffness0.2 arcsec/N・cm8. Moment load stiffness is measured in a direction perpendicular to the motion axis.
Load Capacity (Horizontal)53.9N(5.5kgf)9. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate.
MaterialAluminum Alloy10. Material specification is for stage's main body components only.
FinishClear-Matte Anodizing11. Surface finish type and color.
Weight 0.93kg12. Stage weight includes all components depicted in product photograph.
Perpendicularity≦20μm/13mm13. Perpendicularity (or orthogonality) between motion axes in a dual-axis XY stage assembly.
ActuatorFine Pitch Positioner FPP03-13 (13mm)14. Actuator model number and travel range.。
Price(JPY) 15. Catalog price in Japanese currency
Overhaul Price * 16. Overhaul price in Japanese currency
Clean Room Lubricant Change Price 17. Clean Room Lubricant change Price in Japanese currency.
Vacuum Lubricant Change Price 18. Vacuum Lubricant change Price in Japanese currency.
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